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NEW TRENDS ON ELECTROCHEMICAL NANO-TECHNOLOGIES
Nano-processing and nano-technology have attracted much attention in the past decades and have been utilized for fabricating information storage devices, chip interconnects, microelectronic packaging, micromechanical components, and sensors. Electrochemical nano-processing method, particularly, is a powerful technique as already shown in its applications to fabrication of magnetic recording heads or the ULSI interconnects. In the fabrication of magnetic recording heads, an electrochemical paddle plating system with a frame plating method enabled us to form a shape of three-dimensional complexity in micro-size patterning. Neither conventional dry processes nor conventional technologies of
electroplating and etching have realized such a nano-scale fabrication. Namely, the electrochemical paddle plating is a great innovation contributing to the creation of new technologies. On the other hand, we found the basic idea how to control the interface between electrode and electrolyte on the basis of atomic level mono- or sub-adsorbed layer (ad-atom layer) and, indeed, applied it to the fabrication of high-density magnetic recording medium with electroless deposition. The basic idea and the combination of the idea with nano-fabrication using electrochemical method have led to our successes in electrochemical nano-technologies. Nowadays, electrochemical wet processes are practically used in a clean room with a filtering apparatus for fabricating fine patterned devices.
We developed electrodeposition methods to fabricate CoNiFe1 and CoFe2 soft magnetic thin films with high saturation magnetic flux density for realizing an ultra high density magnetic recording system. In the field of interconnects in ULSI, the self-assembled monolayer (SAM) for direct bonding to SiO2 and the novel electroless deposition method for barrier layer were developed. In the field of bio-sensor devices, we proposed a significant process for ISFET with lithography using SAM for very small pH sensor and, moreover, the new bio-sensing system was successfully fabricated on the basis of the ISFET. The next stage energy devices for electronics such as a small DMFC were also fabricated . In this paper, new trends in the electrochemical nano-technology are introduced on the basis of the above-mentioned research works on magnetic devices, interconnects for ultra large scale integrated circuit (ULSI) devices, bio-sensor devices and energy storage devices.
Source: Tetsuya Osaka
Department of Applied Chemistry, School of Science and Engineering,
Waseda University
Source: Tetsuya Osaka
Department of Applied Chemistry, School of Science and Engineering,
Waseda University